Invention Grant
- Patent Title: Nano- and microelectromechanical resonators
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Application No.: US15238221Application Date: 2016-08-16
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Publication No.: US09712136B2Publication Date: 2017-07-18
- Inventor: Matteo Rinaldi , Cristian Cassella , Zhenyun Qian , Yu Hui
- Applicant: Northeastern University
- Applicant Address: US MA Boston
- Assignee: Northeastern University
- Current Assignee: Northeastern University
- Current Assignee Address: US MA Boston
- Agency: Posternak Blankstein & Lund LLP
- Main IPC: H03H3/02
- IPC: H03H3/02 ; H03H9/17 ; H03H9/205 ; G01J5/44 ; H03H9/02 ; G01J5/04 ; H01L41/18 ; H03H9/13 ; H03H9/24 ; H03H9/15

Abstract:
A resonator includes a piezoelectric plate and interdigitated electrode(s). The interdigitated electrode includes a plurality of conductive strips disposed over a top surface of the piezoelectric plate. A two-dimensional mode of mechanical vibration is excited in a cross sectional plane of the piezoelectric plate in response to an alternating voltage applied through the interdigitated electrode. The two-dimensional mode of mechanical vibration is a cross-sectional Lamé mode resonance (CLMR) or a degenerate cross-sectional Lamé mode resonance (dCLMR).
Public/Granted literature
- US20170170803A1 NANO- AND MICROELECTROMECHANICAL RESONATORS Public/Granted day:2017-06-15
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