Invention Grant
- Patent Title: Electrical fuse and/or resistor structures
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Application No.: US14826628Application Date: 2015-08-14
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Publication No.: US09716064B2Publication Date: 2017-07-25
- Inventor: Veeraraghavan S. Basker , Kangguo Cheng , Ali Khakifirooz , Juntao Li
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Steven J. Meyers; Andrew M. Calderon
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L23/525 ; H01L23/522 ; H01L23/532 ; H01L49/02 ; H01L23/535 ; H01L21/3105 ; H01L21/311 ; H01L21/8234 ; H01L27/06

Abstract:
Electrical fuse (eFuse) and resistor structures and methods of manufacture are provided. The method includes forming metal gates having a capping material on a top surface thereof. The method further includes protecting the metal gates and the capping material during an etching process which forms a recess in a dielectric material. The method further includes forming an insulator material and metal material within the recess. The method further includes forming a contact in direct electrical contact with the metal material.
Public/Granted literature
- US20170047286A1 ELECTRICAL FUSE AND/OR RESISTOR STRUCTURES Public/Granted day:2017-02-16
Information query
IPC分类: