- Patent Title: Spray unit and apparatus for cleaning substrate having spray unit
-
Application No.: US14849724Application Date: 2015-09-10
-
Publication No.: US09718100B2Publication Date: 2017-08-01
- Inventor: Je-Yung Yum
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-Si, Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-Si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2015-0007621 20150115
- Main IPC: A47L15/42
- IPC: A47L15/42 ; B05B1/04 ; B05B1/18 ; B05B7/04 ; B05B7/08 ; B08B3/02 ; B08B3/04 ; H01L21/67 ; H01L51/00
Abstract:
A spray unit, including a body assembly including a solution supply port, the solution port to supply cleaning solution; a flow channel in the body assembly, the flow channel connected with the solution supply port, the cleaning solution to flow through the flow channel; and a spray slit connected to the flow channel, the spray slit to spray out the cleaning solution, the flow channel including at least two chambers to hold the cleaning solution and at least two internal slits connecting the chambers to each other.
Public/Granted literature
- US20160207074A1 SPRAY UNIT AND APPARATUS FOR CLEANING SUBSTRATE HAVING SPRAY UNIT Public/Granted day:2016-07-21
Information query
