Invention Grant
- Patent Title: UV light source having combined ionization and formation of excimers
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Application No.: US14436884Application Date: 2013-10-18
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Publication No.: US09718705B2Publication Date: 2017-08-01
- Inventor: Bentsian Elkin , Alexander Lohner , Siegfried Egner
- Applicant: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Applicant Address: DE München AT Bad Bleiberg
- Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.,SICO Technology GmbH
- Current Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.,SICO Technology GmbH
- Current Assignee Address: DE München AT Bad Bleiberg
- Agent Gudrun E. Huckett
- Priority: DE102012219064 20121019
- International Application: PCT/EP2013/071880 WO 20131018
- International Announcement: WO2014/060592 WO 20140424
- Main IPC: C02F1/32
- IPC: C02F1/32 ; H01J61/94 ; H01J65/04 ; H01J61/16 ; H01J61/20
Abstract:
The invention relates to a device for producing UV light. Said device provides light from light sources that operate in accordance with different physical principles. The device comprises a chamber having several gas-filled plasma chambers (11, 12), wherein the chamber has at least one area (37, 39) transparent to UV light and/or VUV light. A first group (11) of plasma chambers is filled with an ionizable gas containing mercury and a second group (12) of plasma chambers is filled with a gas that forms excimers when suitably excited.
Public/Granted literature
- US20150274548A1 UV Light Source Having Combined Ionization and Formation of Excimers Public/Granted day:2015-10-01
Information query
