Invention Grant
- Patent Title: Sample-specific reference spectra library
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Application No.: US14630704Application Date: 2015-02-25
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Publication No.: US09719950B2Publication Date: 2017-08-01
- Inventor: Michael James Owen , Ashley Donaldson , Garth Howell , Phillip John Christopher Parker
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, P.C.
- Agent Michael O. Scheinberg
- Main IPC: G01N23/225
- IPC: G01N23/225 ; H01J37/252 ; H01J37/244 ; G01J3/44

Abstract:
A method and apparatus are provided for identifying a material with a sample-specific reference spectral list or library. A sequential approach to SEM-EDS automated mineralogy classification is carried out by performing two or more material classification analyses. A pre-classification step restricts the processing of spectra deconvolution algorithms to a subset of spectra that pass a dominant mineral criteria resulting in a significantly reduced subset of reference spectra that occur within the measured sample in pure enough form at a given minimum quantity. The following complex classification stages involving deconvolution of multiple constituents within measured spectra is based on this sample relevant subset.
Public/Granted literature
- US20160245762A1 Sample-specific Reference Spectra Library Public/Granted day:2016-08-25
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