Invention Grant
- Patent Title: Electronic circuit of fin FET and methof for fabricating the electronic circuit
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Application No.: US15140019Application Date: 2016-04-27
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Publication No.: US09721841B1Publication Date: 2017-08-01
- Inventor: Jun-Jie Wang , Yu-Lin Wang , Ching-Wen Hung , En-Chiuan Liou , Chih-Sen Huang
- Applicant: United Microelectronics Corp.
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L21/8234 ; H01L27/11 ; H01L27/088 ; H01L29/49 ; H01L29/06
Abstract:
An electronic circuit includes a plurality of fin lines on a substrate and a plurality of gate lines with a first line width, crossing over the fin lines. The gate lines are parallel and have a plurality of discontinuous regions forming as a plurality of slots. A region of any one of the gate lines adjacent to an unbalance of the slots has a second line width smaller than the first line width.
Information query
IPC分类:
