Invention Grant
- Patent Title: Method for fabricating a flexible electronic structure and a flexible electronic structure
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Application No.: US14819040Application Date: 2015-08-05
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Publication No.: US09723711B2Publication Date: 2017-08-01
- Inventor: Brian David Elolampi , Roozbeh Ghaffari , Bassel de Graff , William J. Arora , Xiaolong Hu
- Applicant: MC10, Inc.
- Applicant Address: US MA Lexington
- Assignee: MC10, Inc.
- Current Assignee: MC10, Inc.
- Current Assignee Address: US MA Lexington
- Agency: Nixon Peabody LLP
- Main IPC: H05K1/02
- IPC: H05K1/02 ; H01L21/683 ; H05K3/46 ; H05K3/06 ; H05K1/11 ; H05K1/03 ; H01L23/13 ; H01L25/065 ; H01L25/07 ; H01L25/00 ; H01L23/498 ; H01L23/538

Abstract:
Flexible electronic structure and methods for fabricating flexible electronic structures are provided. An example method includes applying a first layer to a substrate, creating a plurality of vias through the first layer to the substrate, and applying a second polymer layer to the first layer such that the second polymer forms anchors contacting at least a portion of the substrate. At least one electronic device layer is disposed on a portion of the second polymer layer. At least one trench is formed through the second polymer layer to expose at least a portion of the first layer. At least a portion of the first layer is removed by exposing the structure to a selective etchant to providing a flexible electronic structure that is in contact with the substrate. The electronic structure can be released from the substrate.
Public/Granted literature
- US20150342036A1 METHOD FOR FABRICATING A FLEXIBLE ELECTRONIC STRUCTURE AND A FLEXIBLE ELECTRONIC STRUCTURE Public/Granted day:2015-11-26
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