Invention Grant
- Patent Title: Individually switched field emission arrays
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Application No.: US14765759Application Date: 2014-02-05
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Publication No.: US09748071B2Publication Date: 2017-08-29
- Inventor: Stephen Angelo Guerrera , Akintunde I. Akinwande
- Applicant: Massachusetts Institute of Technology
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Wolf, Greenfield & Sacks, P.C.
- International Application: PCT/US2014/014926 WO 20140205
- International Announcement: WO2014/124041 WO 20140814
- Main IPC: H01J37/073
- IPC: H01J37/073 ; H01L21/00 ; H01J37/065 ; H01J37/317 ; H01J37/30

Abstract:
An electron beam apparatus is disclosed that includes a plurality of current source elements disposed in at least one field emitter array. Each current source element can be a gated vertical transistor, an ungated vertical transistor, or a current controlled channel that is proximate to an optically-modulated current source. The electron beam apparatus includes a plurality of field emitter tips, each field emitter tip of the plurality of field emitter tips being coupled to a current source element of the plurality of current source elements. The electron beam apparatus is configured to allow selective activation of one or more of the current source elements.
Public/Granted literature
- US20150371810A1 INDIVIDUALLY SWITCHED FIELD EMISSION ARRAYS Public/Granted day:2015-12-24
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