Invention Grant
- Patent Title: Data generating apparatus, energy beam writing apparatus, and energy beam writing method
-
Application No.: US14797714Application Date: 2015-07-13
-
Publication No.: US09748074B2Publication Date: 2017-08-29
- Inventor: Munehiro Ogasawara
- Applicant: NuFlare Technology, Inc.
- Applicant Address: JP Yokohama-shi
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Yokohama-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2014-181217 20140905
- Main IPC: G21K1/08
- IPC: G21K1/08 ; H01J37/302 ; H01J37/317

Abstract:
In one embodiment, a data generating apparatus generates data including an irradiation amount of a beam in each pixel for an energy beam writing apparatus. The data generating apparatus includes a target irradiation amount calculating section configured to calculate a first irradiation amount in each pixel, an irradiation amount rounding section configured to round the first irradiation amount based on an irradiation amount control unit and calculate a second irradiation amount, a difference calculating section configured to calculate a first difference between the first irradiation amount and the second irradiation amount, a difference sum calculating section configured to calculate a sum of the first differences in a first group of a plurality of adjacent pixels, and an allocating section configured to allocate an irradiation amount based on the irradiation amount control unit and the sum to a pixel in the first group.
Public/Granted literature
- US20160071692A1 DATA GENERATING APPARATUS, ENERGY BEAM WRITING APPARATUS, AND ENERGY BEAM WRITING METHOD Public/Granted day:2016-03-10
Information query