Invention Grant
- Patent Title: Micromechanical component and method for manufacturing same
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Application No.: US14734791Application Date: 2015-06-09
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Publication No.: US09751751B2Publication Date: 2017-09-05
- Inventor: Jochen Reinmuth , Johannes Classen
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102014211333 20140613
- Main IPC: B81B7/00
- IPC: B81B7/00
Abstract:
A micromechanical component includes a sensor chip and a cap chip connected to the sensor chip. A cavity is formed between the sensor chip and the cap chip. The sensor chip has a movable element situated in the cavity. The cap chip has a wiring level containing an electrically conductive electrode. The cap chip has a getter element situated in the cavity.
Public/Granted literature
- US20150360937A1 Micromechanical component and method for manufacturing same Public/Granted day:2015-12-17
Information query
