Invention Grant
- Patent Title: Charged particle source
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Application No.: US15404694Application Date: 2017-01-12
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Publication No.: US09754760B2Publication Date: 2017-09-05
- Inventor: Shuai Li
- Applicant: Hermes Microvision Inc.
- Applicant Address: TW Hsinchu
- Assignee: HERMES MICROVISION INC.
- Current Assignee: HERMES MICROVISION INC.
- Current Assignee Address: TW Hsinchu
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner LLP
- Main IPC: H01J37/143
- IPC: H01J37/143 ; H01J37/28 ; H01J37/09

Abstract:
This invention provides a charged particle source, which comprises an emitter and means of generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.
Public/Granted literature
- US20170125204A1 Charged Particle Source Public/Granted day:2017-05-04
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