Invention Grant
- Patent Title: Apparatus for flipping semiconductor device for transferring the semiconductor device between substrates
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Application No.: US14960819Application Date: 2015-12-07
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Publication No.: US09754808B2Publication Date: 2017-09-05
- Inventor: Chih-Wei Wei , Chia-Liang Hsu
- Applicant: EPISTAR CORPORATION
- Applicant Address: TW Hsinchu
- Assignee: EPISTAR CORPORATION
- Current Assignee: EPISTAR CORPORATION
- Current Assignee Address: TW Hsinchu
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L21/50
- IPC: H01L21/50 ; H01L21/68 ; B21D37/14 ; H01L21/67

Abstract:
A method for automatically transferring multiple semiconductor devices from a first substrate to a second substrate comprises steps of providing a first substrate on which the semiconductor device is formed, providing a second substrate directly under the first substrate, automatically moving the first substrate toward the second substrate such that the semiconductor devices are close to the second substrate; connecting the semiconductor devices to the second substrate by exerting force to the second substrate, and taking out the semiconductor devices simultaneously from the first substrate.
Public/Granted literature
- US20160086836A1 APPARATUS FOR FLIPPING SEMICONDUCTOR DEVICE Public/Granted day:2016-03-24
Information query
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