Invention Grant
- Patent Title: Vitreous silica crucible for pulling of silicon single crystal and method for manufacturing the same
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Application No.: US14894328Application Date: 2013-05-31
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Publication No.: US09758901B2Publication Date: 2017-09-12
- Inventor: Toshiaki Sudo , Ken Kitahara , Akihiro Aiba , Kazushi Ousyuya , Fumie Yoshida , Makiko Hinooka , Eriko Kitahara , Tadahiro Sato
- Applicant: SUMCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SUMCO CORPORATION
- Current Assignee: SUMCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Law Office of Katsuhiro Arai
- International Application: PCT/JP2013/065294 WO 20130531
- International Announcement: WO2014/192163 WO 20141204
- Main IPC: C30B15/10
- IPC: C30B15/10 ; C03B19/09 ; C30B29/06 ; C30B35/00

Abstract:
The present invention provides a vitreous silica crucible which inhibits a deformation even when used under a high temperature condition for a long time, and a method for manufacturing the same. The vitreous silica crucible comprises: a substantially cylindrical straight body portion having an opening on the top end and extending in a vertical direction, a curved bottom portion, and a corner portion connecting the straight body portion with the bottom portion and a curvature of which is greater than that of the bottom portion, wherein, the vitreous silica crucible comprises a transparent layer on the inside and a bubble layer on the outside thereof, a compressive stress layer in which compressive stress remains in the inner surface side of the transparent layer, and a tensile stress layer in which tensile stress remains and is adjacent to the compressive stress layer at a gradual rate of change of stress.
Public/Granted literature
- US20160108550A1 VITREOUS SILICA CRUCIBLE FOR PULLING OF SILICON SINGLE CRYSTAL AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2016-04-21
Information query
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