Invention Grant
- Patent Title: Method of performing spectroscopy in a transmission charged-particle microscope
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Application No.: US15072929Application Date: 2016-03-17
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Publication No.: US09778377B2Publication Date: 2017-10-03
- Inventor: Luigi Mele , Albertus Aemillius Seyno Sluijterman , Gerard Nicolaas Anne van Veen
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, P.C.
- Agent Michael O. Scheinberg
- Priority: EP15159576 20150318
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/28 ; G01T1/20 ; H01L31/107 ; H04N5/32 ; H01L27/146 ; H01L27/148

Abstract:
A Transmission Charged-Particle Microscope comprises a source of charged particles which are then directed by an illuminator onto a specimen supported by a specimen holder. Charged particles transmitted through the specimen may undergo energy loss with a distribution of losses providing information about the specimen. A dispersing device disperses the transmitted charged particles into an energy-resolved array of spectral sub-beams distributed along a dispersion direction. The dispersed charged particles are detected by a detector comprising an assembly of sub-detectors arranged along said dispersion direction, whereby different sub-detectors are adjustable to have different detection sensitivities.
Public/Granted literature
- US20160276130A1 METHOD OF PERFORMING SPECTROSCOPY IN A TRANSMISSION CHARGED-PARTICLE MICROSCOPE Public/Granted day:2016-09-22
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