- Patent Title: Micromechanical sensor device and corresponding production method
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Application No.: US14778593Application Date: 2014-03-13
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Publication No.: US09780284B2Publication Date: 2017-10-03
- Inventor: Georg Bischopink , Christoph Schelling
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck LLP
- Priority: DE102013204763 20130319
- International Application: PCT/EP2014/054938 WO 20140313
- International Announcement: WO2014/146965 WO 20140925
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L37/02 ; G01J5/04 ; G01J5/02 ; G01J5/34 ; G01J5/08 ; H01L31/0224 ; H01L31/09 ; H01L31/18

Abstract:
A micromechanical sensor device and a corresponding production method include a substrate that has a front and a rear and a plurality of pillars that are formed on the front of the substrate. On each pillar, a respective sensor element is formed, which has a greater lateral extent than the associated pillar. A cavity is provided laterally to the pillars beneath the sensor elements. The sensor elements are laterally spaced apart from each other by respective separating troughs and make electrical contact with a respective associated rear contact via the respective associated pillar.
Public/Granted literature
- US20160056365A1 Micromechanical Sensor Device and Corresponding Production Method Public/Granted day:2016-02-25
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