Invention Grant
- Patent Title: Substrate treatment method and substrate treatment apparatus
-
Application No.: US14659701Application Date: 2015-03-17
-
Publication No.: US09786522B2Publication Date: 2017-10-10
- Inventor: Kenji Kobayashi , Manabu Okutani
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2014-053683 20140317
- Main IPC: B05B1/24
- IPC: B05B1/24 ; H01L21/67 ; B05C11/08 ; B05D1/02 ; B05B15/06 ; H01L21/687

Abstract:
A substrate treatment method is performed by a substrate treatment apparatus including a substrate holding unit which holds a substrate, and a hot plate which heats the substrate from below. The method includes: a treatment liquid supplying step of locating the hot plate at a retracted position at which the hot plate is retracted below the substrate holding unit and, in this state, supplying a treatment liquid to an upper surface of the substrate held by the substrate holding unit; a protection liquid film forming step of forming a liquid film of a protection liquid to cover an upper surface of the hot plate in the treatment liquid supplying step; and a substrate heating step of heating the substrate by the hot plate with the hot plate being located adjacent to a lower surface of the substrate or in contact with the lower surface of the substrate.
Public/Granted literature
- US20150258553A1 SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS Public/Granted day:2015-09-17
Information query