Invention Grant
- Patent Title: Through-silicon via (TSV)-based devices and associated techniques and configurations
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Application No.: US14203415Application Date: 2014-03-10
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Publication No.: US09786581B2Publication Date: 2017-10-10
- Inventor: Telesphor Kamgaing
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L23/48 ; H01L23/64 ; H01L49/02 ; B81C1/00 ; H01L27/06

Abstract:
Embodiments of the present disclosure are directed toward through-silicon via (TSV)-based devices and associated techniques and configurations. In one embodiment, an apparatus includes a die having active circuitry disposed on a first side of the die and a second side disposed opposite to the first side, a bulk semiconductor material disposed between the first side and the second side of the die and a device including one or more of a capacitor, resistor or resonator disposed in the bulk semiconductor material, the capacitor, resistor or resonator including one or more TSV structures that extend through the bulk semiconductor material, an electrically insulative material disposed in the one or more TSV structures and an electrode material or resistor material in contact with the electrically insulative material within the one or more TSV structures.
Public/Granted literature
- US20150255372A1 THROUGH-SILICON VIA (TSV)-BASED DEVICES AND ASSOCIATED TECHNIQUES AND CONFIGURATIONS Public/Granted day:2015-09-10
Information query
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