Invention Grant
- Patent Title: Method for fabricating a micro-well of a biosensor
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Application No.: US15436938Application Date: 2017-02-20
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Publication No.: US09796584B2Publication Date: 2017-10-24
- Inventor: Che-Ming Chang , Chih-Jen Chan , Chung-Yen Chou , Lee-Chuan Tseng , Shih-Wei Lin , Yuan-Chih Hsieh
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B81C1/00 ; G01N27/414 ; B81B1/00 ; B01L3/00

Abstract:
A bio-sensing semiconductor structure is provided. A transistor includes a channel region and a gate underlying the channel region. A first dielectric layer overlies the transistor. A first opening extends through the first dielectric layer to expose the channel region. A bio-sensing layer lines the first opening and covers an upper surface of the channel region. A second dielectric layer lines the first opening over the bio-sensing layer. A second opening within the first opening extends to the bio-sensing layer, through a region of the second dielectric layer overlying the channel region. A method for manufacturing the bio-sensing semiconductor structure is also provided.
Public/Granted literature
- US20170158500A1 METHOD FOR FABRICATING A MICRO-WELL OF A BIOSENSOR Public/Granted day:2017-06-08
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