Invention Grant
- Patent Title: Method for evaluating silica glass crucible, method for producing silicon single crystals
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Application No.: US14365523Application Date: 2012-10-31
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Publication No.: US09809902B2Publication Date: 2017-11-07
- Inventor: Toshiaki Sudo , Tadahiro Sato , Ken Kitahara , Eriko Kitahara , Makiko Kodama
- Applicant: SUMCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SUMCO CORPORATION
- Current Assignee: SUMCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Law Office of Katushiro Arai
- Priority: JP2011-282404 20111222; JP2011-282406 20111222; JP2011-282408 20111222; JP2011-282409 20111222; JP2011-282410 20111222; JP2011-282411 20111222; JP2011-282412 20111222
- International Application: PCT/JP2012/078260 WO 20121031
- International Announcement: WO2013/094318 WO 20130627
- Main IPC: C30B15/26
- IPC: C30B15/26 ; C30B29/06 ; G01B11/00 ; C30B15/10 ; G01B11/06 ; G01B11/245 ; G01B11/24 ; G01J3/42 ; G01J5/58

Abstract:
The present invention provides a method for evaluating a vitreous silica crucible which can measure a three-dimensional shape of the inner surface of the crucible in a non-destructive manner. According to the present invention, A method for evaluating a vitreous silica crucible, including the steps of: moving an internal ranging section along an inner surface of the vitreous silica crucible in a contactless manner; measuring a distance between the internal ranging section and the inner surface as a distance from the inner surface, by subjecting the inner surface of the crucible to irradiation with laser light and then detecting a reflected light from the inner surface, the laser light being emitted from the internal ranging section in an oblique direction with respect to the inner surface, and the measurement being conducted at a plurality of measuring points along a course of a movement of the internal ranging section; and obtaining a three-dimensional shape of the inner surface of the crucible, by associating three-dimensional coordinates of each of the measuring points with the distance from the inner surface, is provided.
Public/Granted literature
- US20140326172A1 METHOD FOR EVALUATING SILICA GLASS CRUCIBLE, METHOD FOR PRODUCING SILICON SINGLE CRYSTALS Public/Granted day:2014-11-06
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