Invention Grant
- Patent Title: Lithographic apparatus and device manufacturing method
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Application No.: US15003768Application Date: 2016-01-21
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Publication No.: US09811005B2Publication Date: 2017-11-07
- Inventor: Yang-Shan Huang , Theodorus Petrus Maria Cadee
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A substrate stage is used in a lithographic apparatus. The substrate stage includes a substrate table constructed to hold a substrate and a positioning device for in use positioning the substrate table relative to a projection system of the lithographic apparatus. The positioning device includes a first positioning member mounted to the substrate table and a second positioning member co-operating with the first positioning member to position the substrate table. The second positioning member is mounted to a support structure. The substrate stage further comprises an actuator that is arranged to exert a vertical force on a bottom surface of the substrate table at a substantially fixed horizontal position relative to the support structure.
Public/Granted literature
- US20160154322A1 Lithographic Apparatus and Device Manufacturing Method Public/Granted day:2016-06-02
Information query
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