Invention Grant
- Patent Title: Micro stage for particle beam column using piezo elements as actuator
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Application No.: US14657234Application Date: 2015-03-13
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Publication No.: US09837245B2Publication Date: 2017-12-05
- Inventor: Ho Seob Kim , Byeng Jin Kim , Do Jin Seong
- Applicant: Ho Seob Kim , Byeng Jin Kim , Do Jin Seong
- Applicant Address: KR Asan-si, Chungcheongnam-Do
- Assignee: CEBT CO., LTD.
- Current Assignee: CEBT CO., LTD.
- Current Assignee Address: KR Asan-si, Chungcheongnam-Do
- Agency: Park Law Firm
- Agent John K. Park
- Main IPC: G21K5/10
- IPC: G21K5/10 ; H01J37/26 ; H01J37/20 ; H01J37/10 ; H02N2/00 ; H02N2/02
Abstract:
Disclosed herein is a micro stage using a piezoelectric element that can be reliably operated even in a vacuum environment. In a particle column requiring a high precision, for example, a microelectronic column, the micro stage can be used as a stage with micro or nano degree precision for alignment of parts of the column, or for moving a sample, and so on.
Public/Granted literature
- US20160268929A1 Micro Stage using piezo elements Public/Granted day:2016-09-15
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