Invention Grant
- Patent Title: Radiation source
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Application No.: US15502462Application Date: 2015-07-27
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Publication No.: US09853412B2Publication Date: 2017-12-26
- Inventor: Andrey Alexandrovich Nikipelov , Teis Johan Coenen , Wouter Joep Engelen , Gerrit Jacobus Hendrik Brussaard , Gijsbertus Geert Poorter , Erik Roelof Loopstra
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: EP14181152 20140815; EP15170640 20150604
- International Application: PCT/EP2015/067159 WO 20150727
- International Announcement: WO2016/023740 WO 20160218
- Main IPC: H01S3/00
- IPC: H01S3/00 ; H01S3/09 ; H01S3/0959 ; H01S3/11 ; H01S3/102

Abstract:
Passage through LINACs of electron bunches in their acceleration phase is coordinated with passage through the LINACs of electron bunches in their deceleration phase. Each successive pair of electron bunches are spaced in time by a respective bunch spacing, in accordance with a repeating electron bunch sequence. The electron source provides clearing gaps in the electron bunch sequence to allow clearing of ions at the undulator. The electron source provides the clearing gaps in accordance with a clearing gap sequence such that, for each of the plurality of energy recovery LINACS, and for substantially all of the clearing gaps: for each passage of the clearing gap through the LINAC in an acceleration phase or deceleration phase the clearing gap is coordinated with a further one of the clearing gaps passing through the LINAC in a deceleration phase or acceleration phase thereby to maintain energy recovery operation of the LINAC.
Public/Granted literature
- US20170237225A1 RADIATION SOURCE Public/Granted day:2017-08-17
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