Invention Grant
- Patent Title: Extreme ultraviolet light generation apparatus
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Application No.: US15152124Application Date: 2016-05-11
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Publication No.: US09854658B2Publication Date: 2017-12-26
- Inventor: Fumio Iwamoto , Masaki Nakano , Tsukasa Hori
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H05G2/00
- IPC: H05G2/00

Abstract:
An extreme ultraviolet light generation apparatus may include: a chamber in which extreme ultraviolet light is generated when a target is irradiated with a laser beam inside the chamber; a target supply part configured to supply the target into the chamber; and a target collector configured to collect the target which is supplied by the target supply part but is not irradiated with the laser beam in a collection container, by receiving the target on a receiving surface having a contact angle of equal to or smaller than 90 degrees with the target.
Public/Granted literature
- US20160255709A1 EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS Public/Granted day:2016-09-01
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