Invention Grant
- Patent Title: Single-electron transistor with wrap-around gate
-
Application No.: US15140557Application Date: 2016-04-28
-
Publication No.: US09859409B2Publication Date: 2018-01-02
- Inventor: Kangguo Cheng , Xin Miao , Wenyu Xu , Chen Zhang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L29/76 ; H01L29/66 ; H01L21/306 ; H01L29/12 ; H01L21/3105 ; H01L29/423 ; H01L29/08

Abstract:
Transistors and methods of forming the same include forming a fin having an active layer between two sacrificial layers. A dummy gate is formed over the fin. Spacers are formed around the dummy gate. The dummy gate is etched away to form a gap over the fin. Material from the two sacrificial layers is etched away in the gap. A gate stack is formed around the active layer in the gap. Source and drain regions are formed in contact with the active layer.
Public/Granted literature
- US20170317200A1 SINGLE-ELECTRON TRANSISTOR WITH WRAP-AROUND GATE Public/Granted day:2017-11-02
Information query
IPC分类: