Invention Grant
- Patent Title: Deposition apparatus and tray holder
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Application No.: US14620433Application Date: 2015-02-12
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Publication No.: US09861996B2Publication Date: 2018-01-09
- Inventor: Toshiro Higuchi , Hiroshi Ueno , Hitoshi Kimura
- Applicant: NALUX CO., LTD.
- Applicant Address: JP Osaka-Shi, Osaka
- Assignee: NALUX CO., LTD.
- Current Assignee: NALUX CO., LTD.
- Current Assignee Address: JP Osaka-Shi, Osaka
- Agency: Squire Patton Boggs (US) LLP
- Priority: JP2014-047654 20140311
- Main IPC: C23C16/00
- IPC: C23C16/00 ; B05B13/02 ; H01L21/687 ; C23C14/50 ; B05B12/08

Abstract:
A deposition apparatus includes a deposition source; a rotatable dome provided with an opening which covers the source; a first lever provided outside of the dome; and a tray holder including a frame including a first rotating member and a rotating part including a second rotating member and being attached to the frame such that the rotating part rotates with the second rotating member around an axis supported by the frame. The rotating part includes work-holding trays arranged around the axis, the tray holder is installed on the dome such that a side of one of the trays covers the opening, the first rotating member is rotated by the first lever during rotation of the dome, and the second rotating member is rotated with the rotating part by the first rotating member so as to change the tray a side of which covers the opening to another one.
Public/Granted literature
- US20150258561A1 DEPOSITION APPARATUS AND TRAY HOLDER Public/Granted day:2015-09-17
Information query
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