Invention Grant
- Patent Title: Method for pulling silicon single crystal
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Application No.: US14901017Application Date: 2013-06-29
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Publication No.: US09863059B2Publication Date: 2018-01-09
- Inventor: Toshiaki Sudo , Tadahiro Sato , Ken Kitahara , Eriko Kitahara
- Applicant: SUMCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SUMCO CORPORATION
- Current Assignee: SUMCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Law Office of Katsuhiro Arai
- International Application: PCT/JP2013/067945 WO 20130629
- International Announcement: WO2014/207942 WO 20141231
- Main IPC: C30B15/10
- IPC: C30B15/10 ; C30B29/06

Abstract:
A method for pulling silicon single crystal includes a process of placing a molded body between a susceptor's inner surface and a crucible's outer surface. The molded body is formed based on three-dimensional data of the inner surface shape of the susceptor which can hold the vitreous silica crucible and three-dimensional data of the crucible so as to make the susceptor's central axis and the crucible's central axis substantially aligned when it is placed between the susceptor's inner surface and the crucible's outer surface.
Public/Granted literature
- US20160153116A1 METHOD FOR PULLING SILICON SINGLE CRYSTAL Public/Granted day:2016-06-02
Information query
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