Invention Grant
- Patent Title: Supply apparatus and supply method for supplying fluid carbon dioxide
-
Application No.: US14376102Application Date: 2013-01-29
-
Publication No.: US09887079B2Publication Date: 2018-02-06
- Inventor: Hiroshi Sugawara , Yoshinori Ono
- Applicant: ORGANO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ORGANO CORPORATION
- Current Assignee: ORGANO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Knobbe, Martens Olson & Bear, LLP
- Priority: JP2012-020798 20120202
- International Application: PCT/JP2013/051836 WO 20130129
- International Announcement: WO2013/115156 WO 20130808
- Main IPC: H01L21/02
- IPC: H01L21/02 ; F17C7/02 ; F17C7/04 ; B08B7/00 ; B01D5/00 ; C01B32/50

Abstract:
Provided are a supply apparatus and a supply method for supplying fluid carbon dioxide that are energy-saving and efficient. The supply apparatus for supplying fluid carbon dioxide includes: a circulation system including a purifying unit that removes impurities and contaminants from the carbon dioxide, a storage unit that includes a condenser for changing gaseous carbon dioxide passed through the purifying unit into liquid carbon dioxide, a supply unit that includes a first pump for supplying the liquid carbon dioxide in the storage unit to a use point, and a return line through which excess carbon dioxide supplied from the supply unit but not used at the use point is returned to the storage unit; and a carbon dioxide introduction unit that introduces carbon dioxide, as a starting material or recovered gas, to the circulation system. The carbon dioxide introduction unit includes a second pump for increasing the pressure of the carbon dioxide and the second pump introduces the carbon dioxide to the circulation system.
Public/Granted literature
- US20150075636A1 LIQUID CARBON DIOXIDE SUPPLY DEVICE AND SUPPLY METHOD Public/Granted day:2015-03-19
Information query
IPC分类: