Invention Grant
- Patent Title: Semiconductor devices with sidewall spacers of equal thickness
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Application No.: US15272874Application Date: 2016-09-22
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Publication No.: US09887198B2Publication Date: 2018-02-06
- Inventor: Kangguo Cheng , Balasubramanian Pranatharthiharan , Soon-Cheon Seo
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Steven Meyers; Andrew M. Calderon
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L21/8238 ; H01L27/092 ; H01L29/66 ; H01L29/08 ; H01L29/417 ; H01L29/78 ; H01L21/02 ; H01L21/84 ; H01L27/12

Abstract:
Semiconductor structures with different devices each having spacers of equal thickness and methods of manufacture are disclosed. The method includes forming a first gate stack and a second gate stack. The method further includes forming sidewall spacers of equal thickness for both the first gate stack and the second gate stack by depositing a liner material over spacer material on sidewalls of the first gate stack and the second gate stack and within a space formed between the spacer material and source and drain regions of the first gate stack.
Public/Granted literature
- US20170011970A1 SEMICONDUCTOR DEVICES WITH SIDEWALL SPACERS OF EQUAL THICKNESS Public/Granted day:2017-01-12
Information query
IPC分类: