Invention Grant
- Patent Title: MEMS device with improved spring system
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Application No.: US14800612Application Date: 2015-07-15
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Publication No.: US09891053B2Publication Date: 2018-02-13
- Inventor: Joseph Seeger , Ozan Anac
- Applicant: InvenSense, Inc.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: G01C19/00
- IPC: G01C19/00 ; G01C19/5755 ; G01C19/5733

Abstract:
A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. The longitudinal axes of the first and second flexible elements are parallel to each other and parallel to the first direction.
Public/Granted literature
- US20150316379A1 MEMS DEVICE WITH IMPROVED SPRING SYSTEM Public/Granted day:2015-11-05
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