Invention Grant
- Patent Title: Sensor, strain sensor, and pressure sensor
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Application No.: US14842273Application Date: 2015-09-01
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Publication No.: US09891119B2Publication Date: 2018-02-13
- Inventor: Takeru Samejima , Nobuyuki Hamamatsu , Takashi Yoshida
- Applicant: YOKOGAWA ELECTRIC CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Yokogawa Electric Corporation
- Current Assignee: Yokogawa Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2014-180175 20140904
- Main IPC: G01B7/16
- IPC: G01B7/16 ; G01L1/18 ; G01L19/04 ; G01L1/26 ; G01D11/30 ; G01L19/00

Abstract:
A sensor includes a first structure that is attachable to a measurement specimen, a second structure that is made of material which is smaller in thermal expansion coefficient than the first structure, a bottom surface of the second structure being connected to the first structure, and a detector that is connected to an upper surface of the second structure, the detector being configured to detect a deformation of the second structure.
Public/Granted literature
- US20160069755A1 SENSOR, STRAIN SENSOR, AND PRESSURE SENSOR Public/Granted day:2016-03-10
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