Invention Grant
- Patent Title: Electro-mechanical designs for MEMS scanning mirrors
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Application No.: US14977457Application Date: 2015-12-21
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Publication No.: US09910270B2Publication Date: 2018-03-06
- Inventor: Julien Gamet , Alexandre Fotinos , Nicholas Abele
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Main IPC: G02B26/10
- IPC: G02B26/10 ; G02B26/08

Abstract:
Electro-mechanical designs for MEMS scanning mirrors are described. In various embodiments, a driving coil may be situated on a reflective portion of a MEMS mirror. In some embodiments, a sensing coil may be situated partially or entirely on an outer frame portion of the MEMS mirror. Other embodiments are described and claimed.
Public/Granted literature
- US20170102538A1 ELECTRO-MECHANICAL DESIGNS FOR MEMS SCANNING MIRRORS Public/Granted day:2017-04-13
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