- Patent Title: Extended-drain structures for high voltage field effect transistors
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Application No.: US15126812Application Date: 2014-06-18
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Publication No.: US09911815B2Publication Date: 2018-03-06
- Inventor: Nidhi Nidhi , Chia-Hong Jan , Walid M. Hafez
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Green, Howard, Mughal LLP
- International Application: PCT/US2014/042925 WO 20140618
- International Announcement: WO2015/195116 WO 20151223
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L29/78 ; H01L29/10 ; H01L29/66 ; H01L21/265 ; H01L23/66

Abstract:
Planar and non-planar field effect transistors with extended-drain structures, and techniques to fabricate such structures. In an embodiment, a field plate electrode is disposed over an extended-drain, with a field plate dielectric there between. The field plate is disposed farther from the transistor drain than the transistor gate. In a further embodiment, an extended-drain transistor has source and drain contact metal at approximately twice a pitch, of the field plate and the source and/or drain contact metal. In a further embodiment, an isolation dielectric distinct from the gate dielectric is disposed between the extended-drain and the field plate. In a further embodiment, the field plate may be directly coupled to one or more of the transistor gate electrode or a dummy gate electrode without requiring upper level interconnection. In an embodiment, a deep well implant may be disposed between a lightly-doped extended-drain and a substrate to reduce drain-body junction capacitance and improve transistor performance.
Public/Granted literature
- US20170092726A1 EXTENDED-DRAIN STRUCTURES FOR HIGH VOLTAGE FIELD EFFECT TRANSISTORS Public/Granted day:2017-03-30
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