Invention Grant
- Patent Title: MEMS component including a sound-pressure-sensitive diaphragm element
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Application No.: US15212334Application Date: 2016-07-18
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Publication No.: US09914636B2Publication Date: 2018-03-13
- Inventor: Thomas Buck , Fabian Purkl , Michael Stumber , Rolf Scheben , Benedikt Stein , Christoph Schelling
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102015213771 20150722
- Main IPC: B81B3/00
- IPC: B81B3/00 ; H04R17/02

Abstract:
A MEMS microphone component including at least one sound-pressure-sensitive diaphragm element is formed in the layer structure of the MEMS component, which spans an opening in the layer structure. The diaphragm element is attached via at least one column element in the central area of the opening to the layer structure of the component. The deflections of the diaphragm element are detected with the aid of at least one piezosensitive circuit element, which is implemented in the layer structure of the diaphragm element and is situated in the area of the attachment of the diaphragm element to the column element.
Public/Granted literature
- US20170022046A1 MEMS COMPONENT INCLUDING A SOUND-PRESSURE-SENSITIVE DIAPHRAGM ELEMENT Public/Granted day:2017-01-26
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