Invention Grant
- Patent Title: Substrate support assembly having a plasma resistant protective layer
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Application No.: US14086799Application Date: 2013-11-21
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Publication No.: US09916998B2Publication Date: 2018-03-13
- Inventor: Jennifer Y. Sun , Senh Thach , Biraja P. Kanungo , Vahid Firouzdor
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/687
Abstract:
A substrate support assembly comprises a ceramic body and a thermally conductive base bonded to a lower surface of the ceramic body. The substrate support assembly further comprises a protective layer covering an upper surface of the ceramic body, wherein the protective layer comprises at least one of yttrium aluminum garnet (YAG) or a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
Public/Granted literature
- US20140154465A1 SUBSTRATE SUPPORT ASSEMBLY HAVING A PLASMA RESISTANT PROTECTIVE LAYER Public/Granted day:2014-06-05
Information query
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