Invention Grant
- Patent Title: Methods for obtaining and analyzing digital interferometric data for computer testing and developing semiconductor and anisotropic devices and materials
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Application No.: US14984362Application Date: 2015-12-30
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Publication No.: US09952161B2Publication Date: 2018-04-24
- Inventor: Paul L. Pfaff
- Applicant: Attofemto, Inc.
- Applicant Address: US OR Lake Oswego
- Assignee: Attofemto, Inc.
- Current Assignee: Attofemto, Inc.
- Current Assignee Address: US OR Lake Oswego
- Agency: Davis Wright Tremaine LLP
- Agent George C. Rondeau, Jr.
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01N21/95 ; G01B11/24 ; G01N21/17 ; G01N21/23 ; H01L21/66 ; G01B11/16 ; G01B9/02 ; G01B9/021
Abstract:
An interferometric holographic instrument enables the generation of digital data for testing and enabling 2-dimensional and 3-dimensional analysis of “live” and real-time semiconductor or anisotropic devices and materials. The digitally recorded interferometric data can be displayed, stored or connected to a live data stream for transmission to digital processing devices. A digital electric processor or analyzer connected to the recording device, or live data stream, enables the interferometric data to be utilized to test, develop, and shape semiconductor and anisotropic microelectronic processing, wireless and microwave devices.
Public/Granted literature
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