Invention Grant
- Patent Title: Embedded graphite heat spreader for 3DIC
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Application No.: US14639942Application Date: 2015-03-05
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Publication No.: US09953957B2Publication Date: 2018-04-24
- Inventor: Guilian Gao , Charles G. Woychik , Cyprian Emeka Uzoh , Liang Wang
- Applicant: Invensas Corporation
- Applicant Address: US CA San Jose
- Assignee: INVENSAS CORPORATION
- Current Assignee: INVENSAS CORPORATION
- Current Assignee Address: US CA San Jose
- Agency: Haynes and Boone, LLP.
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L23/367 ; H01L23/373 ; H01L23/00 ; H01L25/00 ; H01L23/36

Abstract:
A device with thermal control is presented. In some embodiments, the device includes a plurality of die positioned in a stack, each die including a chip, interconnects through a thickness of the chip, metal features of electrically conductive composition connected to the interconnects on a bottom side of the chip, and adhesive or underfill layer on the bottom side of the chip. At least one thermally conducting layer, which can be a pyrolytic graphite layer, a layer formed of carbon nanotubes, or a graphene layer, is coupled between a top side of one of the plurality of die and a bottom side of an adjoining die in the stack. A heat sink can be coupled to the thermally conducting layer.
Public/Granted literature
- US20160260687A1 EMBEDDED GRAPHITE HEAT SPREADER FOR 3DIC Public/Granted day:2016-09-08
Information query
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