Invention Grant
- Patent Title: Micromechanical pressure sensor
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Application No.: US15396867Application Date: 2017-01-03
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Publication No.: US09957158B2Publication Date: 2018-05-01
- Inventor: Florian Grabmaier , Eckart Schellkes , Timo Lindemann
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102016200263 20160113
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B7/00 ; G01L19/14

Abstract:
A method for producing a pressure sensor comprises providing a substrate with a depression; attaching a micromechanical sensor element to the substrate in the depression; attaching an evaluation circuit to the substrate next to the depression; electrically connecting the evaluation circuit to the sensor element; covering the substrate around the depression by means of a potting die such that the depression is closed; potting the evaluation circuit between the substrate and the potting die; and removing the potting die.
Public/Granted literature
- US20170197824A1 MICROMECHANICAL PRESSURE SENSOR Public/Granted day:2017-07-13
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