Invention Grant
- Patent Title: Configuration to reduce non-linear motion
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Application No.: US14495786Application Date: 2014-09-24
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Publication No.: US09958271B2Publication Date: 2018-05-01
- Inventor: Ozan Anac , Joseph Seeger
- Applicant: InvenSense, Inc.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: G01C19/5762
- IPC: G01C19/5762 ; G01C19/56 ; G01C19/5733 ; G01C19/5747 ; G01P15/08 ; B81B3/00

Abstract:
Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized.
Public/Granted literature
- US20160363445A1 CONFIGURATION TO REDUCE NON-LINEAR MOTION Public/Granted day:2016-12-15
Information query
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