Invention Grant
- Patent Title: Resistive random-access memory structure and method for fabricating the same
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Application No.: US15449632Application Date: 2017-03-03
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Publication No.: US09960349B2Publication Date: 2018-05-01
- Inventor: Yi-Hsiu Chen , Ming-Hung Hsieh , Po-Yen Hsu , Ting-Ying Shen
- Applicant: Winbond Electronics Corp.
- Applicant Address: TW Taichung
- Assignee: Winbond Electronics Corp.
- Current Assignee: Winbond Electronics Corp.
- Current Assignee Address: TW Taichung
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: CN201610122457 20160304
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A resistive random-access memory structure and a method for fabricating a resistive random-access memory structure are described. A first dielectric layer is formed on a substrate. A plurality of bottom electrodes are independently embedded in the first dielectric layer. A transition metal oxide layer covers the plurality of bottom electrodes and extends onto a portion of the first dielectric layer. The minimum distance between the bottom electrode and a sidewall of the transition metal oxide layer is a first distance. The first distance is in a range of 10 nm to 200 μm. A top electrode is formed on the transition metal oxide layer.
Public/Granted literature
- US20170256711A1 RESISTIVE RANDOM-ACCESS MEMORY STRUCTURE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2017-09-07
Information query
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