A stress compensated oscillator circuitry comprises a sensor arrangement for providing a sensor output signal SSensor, wherein the sensor output signal SSensor is based on an instantaneous stress or strain component σ in the semiconductor substrate, a processing arrangement for processing the sensor output signal SSensor and providing a control signal SControl depending on the instantaneous stress or strain component σ in the semiconductor substrate, and an oscillator arrangement for providing an oscillator output signal Sosc having an oscillator frequency fosc based on the control signal SControl, wherein the control signal SControl controls the oscillator output signal Sosc, and wherein the control signal SControl reduces the influence of the instantaneous stress or strain component σ in the semiconductor substrate onto the oscillator output signal Sosc, so that the oscillator circuitry provides a stress compensated oscillator output signal.