Invention Grant
- Patent Title: Systems and methods for graphene mechanical oscillators with tunable frequencies
-
Application No.: US14522534Application Date: 2014-10-23
-
Publication No.: US09960734B2Publication Date: 2018-05-01
- Inventor: Changyao Chen , James Hone , Sunwoo Lee
- Applicant: The Trustees Of Columbia University In The City Of New York
- Applicant Address: US NY New York
- Assignee: The Trustees of Columbia University in the City of New York
- Current Assignee: The Trustees of Columbia University in the City of New York
- Current Assignee Address: US NY New York
- Agency: Baker Botts LLP
- Main IPC: H03B5/32
- IPC: H03B5/32 ; H03B5/30 ; H01L21/02 ; H03H3/02 ; H03H9/17 ; H01L29/84 ; H01L29/06 ; H01L29/165 ; H03H9/02 ; H01L29/00 ; G01J5/04 ; G01J5/44 ; H01L41/18
Abstract:
A nano-electro-mechanical systems (NEMS) oscillator can include an insulating substrate, a source electrode and a drain electrode, a metal local gate electrode, and a micron-sized, atomically thin graphene resonator. The source electrode and drain electrode can be disposed on the insulating substrate. The metal local gate electrode can be disposed on the insulating substrate. The graphene resonator can be suspended over the metal local gate electrode and define a vacuum gap between the graphene resonator and the metal local gate electrode.
Public/Granted literature
- US20170025998A1 Systems and Methods for Graphene Mechanical Oscillators with Tunable Frequencies Public/Granted day:2017-01-26
Information query
