Invention Grant
- Patent Title: Wafer level spectrometer
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Application No.: US14860598Application Date: 2015-09-21
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Publication No.: US09964440B2Publication Date: 2018-05-08
- Inventor: Earl M. Jensen , Mei H. Sun , Kevin O'Brien
- Applicant: KLA Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: US CA Milpitas
- Agency: JDI Patent
- Agent Joshua Isenberg
- Main IPC: H01L27/142
- IPC: H01L27/142 ; G01J3/02 ; G01J1/58 ; G01J3/36 ; G01J3/12

Abstract:
A sensor apparatus has a substrate and a spectrally selective detection system, and a cover. The spectrally sensitive detection system is sandwiched between the substrate and the cover. The spectrally selective detection system includes a generally laminar array of wavelength selectors optically coupled to a corresponding array of optical detectors located within the substrate. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
Public/Granted literature
- US20160011046A1 WAFER LEVEL SPECTROMETER Public/Granted day:2016-01-14
Information query
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