Invention Grant
- Patent Title: Image sensor with inverted source follower
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Application No.: US15791191Application Date: 2017-10-23
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Publication No.: US09966408B1Publication Date: 2018-05-08
- Inventor: Duli Mao , Dajiang Yang , Gang Chen , Vincent Venezia , Dyson H. Tai
- Applicant: OMNIVISION TECHNOLOGIES, INC.
- Applicant Address: US CA Santa Clara
- Assignee: OmniVision Technologies, Inc.
- Current Assignee: OmniVision Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/146 ; H01L21/265 ; H01L29/10 ; H01L29/08

Abstract:
A method of image sensor fabrication includes forming a photodiode and a floating diffusion in a first semiconductor material, and removing part of an oxide layer disposed proximate to a seed area on a surface of the first semiconductor material. The method also includes depositing a second semiconductor material over the surface of the first semiconductor material, and annealing the first semiconductor material and second semiconductor material. A portion of the second semiconductor material is etched away to form part of a source follower transistor, and dopant is implanted into the second semiconductor material to form a first doped region, a third doped region, and a second doped region. The second doped region is laterally disposed between the first doped region and the third doped region, and the second doped region is a channel of the source follower transistor.
Information query
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