A method for creating a functional coating on a substrate in vacuum from a deposited monomer material in absence of oxygen and/or radiation from a radiation source. The substrate may be preliminarily activated with inert gas to form an activated layer thereon. The method may include depositing a fluorine containing monomer having a first CF3:CF2 ratio, and forming, on the substrate, the self-assembled polymer coating that has a second CF3:CF2 ratio, where the first and second CF3:CF2 ratios are equal.