Invention Grant
- Patent Title: Fin patterns with varying spacing without fin cut
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Application No.: US15627685Application Date: 2017-06-20
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Publication No.: US09984877B2Publication Date: 2018-05-29
- Inventor: Marc A. Bergendahl , Kangguo Cheng , John R. Sporre , Sean Teehan
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/033

Abstract:
Methods of forming semiconductor fins include forming first spacers on a first sidewall of each of a plurality of mandrels using an angled deposition process. A second sidewall of one or more of the plurality of mandrels is masked. Second spacers are formed on a second sidewall of all unmasked mandrels. The second sidewall of the one or more of the plurality of mandrels is unmasked. The mandrels are etched away. Fins are formed from a substrate using the first and second spacers as a mask.
Public/Granted literature
- US20170330754A1 FIN PATTERNS WITH VARYING SPACING WITHOUT FIN CUT Public/Granted day:2017-11-16
Information query
IPC分类: