Invention Grant
- Patent Title: Inline dispense capacitor system
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Application No.: US15188394Application Date: 2016-06-21
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Publication No.: US09987655B2Publication Date: 2018-06-05
- Inventor: Anton J. deVilliers , Ronald Nasman , James Grootegoed , Norman A. Jacobson, Jr.
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: B05C11/00
- IPC: B05C11/00 ; B05C9/00 ; B05C11/10 ; F04B13/00 ; F04B43/00 ; G03F7/16 ; F04B13/02 ; F04B43/08 ; F04B43/107 ; G03F7/30 ; H01L27/00 ; H01L27/11582 ; H01L21/67 ; F04B7/00

Abstract:
A fluid dispensing apparatus and method is disclosed. Systems include an in-line or linear bladder apparatus array configured to expand to collect a charge of fluid, and contract to assist with fluid delivery and dispensing. The bladder array is disposed within a chamber of pressure control fluid common to exterior surfaces of each bladder in the bladder array. Simultaneously, some bladders within the array of linear bladders can be dispensing fluid or maintaining fluid while some bladders are collecting fluid. A given filtration rate can be less than a dispense rate and thus the system herein compensates for filter-lag that often accompanies fluid filtering for microfabrication, while providing a generally linear configuration that reduces chances for defect creation. With multiple bladders, multiple different types of fluid can be readied for selective dispense.
Public/Granted literature
- US20160375459A1 Inline Dispense Capacitor System Public/Granted day:2016-12-29
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