公开(公告)号：WO2016109355A1

公开(公告)日：2016-07-07

申请号：PCT/US2015/067463

申请日：2015-12-22

Applicant: BRIBBLA DYNAMICS LLC

IPC: G01N21/49 ,  G01N21/17 ,  G01N21/47

CPC classification number: G01N21/59 ,  G01N21/49 ,  G01N2021/1782 ,  G01N2021/4709 ,  G01N2021/4711 ,  G01N2201/066 ,  G01N2201/0691 ,  G01N2201/0696 ,  G01N2201/12

Abstract: An illuminator/collector assembly (104) can deliver incident light (106) to a sample (102) and collect return light (112) returning from the sample (102). A sensor (114) can measure ray intensities as a function of ray position and ray angle for the collected return light (112). A ray selector can select a first subset of rays from the collected return light (112) at the sensor (114) that meet a first selection criterion. In some examples, the ray selector can aggregate ray intensities into bins, each bin corresponding to rays in the collected return light (112) that traverse within the sample (102) an estimated optical path length within a respective range of optical path lengths. A characterizer can determine a physical property of the sample (102), such as absorptivity, based on the ray intensities, ray positions, and ray angles for the first subset of rays. Accounting for variations in optical path length traversed within the sample can improve accuracy.

Abstract translation: 照明器/收集器组件（104）可将入射光（106）输送到样品（102）并收集从样品（102）返回的返回光（112）。 传感器（114）可以测量作为所收集的返回光（112）的射线位置和射线角度的函数的射线强度。 射线选择器可以从满足第一选择标准的传感器（114）处的收集的返回光（112）中选择光线的第一子集。 在一些示例中，射线选择器可以将射线强度聚集成箱体，每个仓对应于在采样（102）内横穿的所收集的返回光线（112）内的光线在光程长度的相应范围内的估计光程长度。 基于射线强度，射线位置和第一射线子集的射线角度，表征器可以确定样品（102）的物理性质，例如吸收率。 考虑样品内的光程长度变化可以提高精度。

公开(公告)号：WO2017048497A1

公开(公告)日：2017-03-23

申请号：PCT/US2016/049326

申请日：2016-08-29

Applicant: BRIBBLA DYNAMICS LLC

IPC: G01N21/27

CPC classification number: G01N21/274 ,  G01N2201/124 ,  G01N2201/12723 ,  G01N2201/12776

Abstract: Methods and systems for measurement time distribution (1276, 1277, 1278) for referencing schemes are disclosed. The disclosed methods and systems are capable of dynamically changing the measurement time distribution based on the sample signal, reference signal, noise levels, and SNR. The methods and systems are configured with a plurality of measurement states, including a sample measurement state (1282), reference measurement state (1284), and dark measurement state (1286). In some examples, the measurement time distribution scheme can be based on the operating wavelength, the measurement location at the sampling interface, and/or targeted SNR. Examples of the disclosure further include systems and methods for measuring the different measurement states concurrently. Moreover, the systems and methods can include a high-frequency detector to eliminate or reduce decorrelated noise fluctuations that can lower the SNR.

Abstract translation: 公开了用于参考方案的测量时间分布的方法和系统（1276,1277,1278）。 所公开的方法和系统能够基于采样信号，参考信号，噪声电平和SNR来动态地改变测量时间分布。 方法和系统配置有多个测量状态，包括样本测量状态（1282），参考测量状态（1284）和暗测量状态（1286）。 在一些示例中，测量时间分配方案可以基于工作波长，采样接口处的测量位置和/或目标SNR。 本公开的实例还包括同时测量不同测量状态的系统和方法。 此外，系统和方法可以包括高频检测器以消除或减少可降低SNR的去相关噪声波动。

公开(公告)号：WO2017040431A1

公开(公告)日：2017-03-09

申请号：PCT/US2016/049330

申请日：2016-08-29

Applicant: BRIBBLA DYNAMICS LLC

IPC: G01N21/27 ,  G01N21/47 ,  G01J3/08 ,  G02B26/04 ,  G01N21/49 ,  G01N21/21 ,  G01N21/35

CPC classification number: G01N21/276 ,  G01J3/0286 ,  G01J3/32 ,  G01J3/36 ,  G01J3/42 ,  G01J3/433 ,  G01J3/447 ,  G01N21/21 ,  G01N21/35 ,  G01N21/474 ,  G01N21/4785 ,  G01N21/49 ,  G01N2021/4709 ,  G01N2021/4778 ,  G01N2201/0221 ,  G01N2201/12707 ,  G01N2201/12723

Abstract: This relates to systems (600) and methods for measuring a concentration and type of substance in a sample (620) at a sampling interface. The systems (600) includes a light source (602), one or more optics (606, 610, 612), one or more modulators (634, 636), a reference (608), a detector (630), and a controller (640). The systems and methods disclosed can be capable of accounting for drift originating from the light source, one or more optics, and the detector by sharing one or more components between different measurement light paths. Additionally, the systems can be capable of differentiating between different types of drift and eliminating erroneous measurements due to stray light with the placement of one or more modulators between the light source and the sample or reference. Furthermore, the systems can be capable of detecting the substance along various locations and depths within the sample by mapping a detector pixel and a microoptics to the location and depth in the sample.

Abstract translation: 这涉及用于在取样界面处测量样品（620）中的物质的浓度和类型的系统（600）和方法。 系统（600）包括光源（602），一个或多个光学器件（606,610,612），一个或多个调制器（634,636），参考（608），检测器（630）和控制器 （640）。 所公开的系统和方法能够通过在不同测量光路之间共享一个或多个部件来考虑源自光源，一个或多个光学器件和检测器的漂移。 此外，该系统能够区分不同类型的漂移，并消除由于在光源和样品或参考之间放置一个或多个调制器的杂散光而导致的错误测量。 此外，系统能够通过将检测器像素和微光学映射到样品中的位置和深度来检测样品内沿着各个位置和深度的物质。

公开(公告)号：WO2016106368A1

公开(公告)日：2016-06-30

申请号：PCT/US2015/067480

申请日：2015-12-22

Applicant: BRIBBLA DYNAMICS LLC

IPC: G02B21/00

CPC classification number: G02B21/0016 ,  G01N21/47 ,  G01N21/55 ,  G01N2201/0638 ,  G01N2201/068 ,  G02B21/0032 ,  G02B21/0052 ,  G02B21/008

Abstract: A confocal inspection system can optically characterize a sample. An objective lens, or separate incident and return lenses, can deliver incident light from a light source to the sample, and can collect light from the sample. Confocal optics can direct the collected light onto a detector. The system can average the incident light over multiple locations at the sample, for example, by scanning the incident light with a pivotable mirror in the incident and return optical paths, or by illuminating and collecting with multiple spaced-apart confocal apertures. The system can average the collected light, for example, by directing the collected light onto a single-pixel detector, or by directing the collected light onto a multi-pixel detector and averaging the pixel output signals to form a single electronic signal. Averaging the incident and/or return light can be advantageous for structured or inhomogeneous samples.

Abstract translation: 共焦检查系统可以光学地表征样品。 物镜或单独的入射和返回镜头可以将来自光源的入射光输送到样品，并且可以从样品收集光。 共焦光学器件可以将收集的光引导到检测器上。 该系统可以将样品上的多个位置的入射光平均化，例如通过在入射和返回光路中用可枢转镜扫描入射光，或通过用多个间隔开的共聚焦孔照射和收集来平均入射光。 该系统可以例如通过将收集的光引导到单像素检测器上，或者将收集的光引导到多像素检测器上并使像素输出信号平均以形成单个电子信号来平均所收集的光。 平均事件和/或返回光对于结构化或不均匀的样本是有利的。

公开(公告)号：WO2017184423A1

公开(公告)日：2017-10-26

申请号：PCT/US2017/027377

申请日：2017-04-13

Applicant: BRIBBLA DYNAMICS LLC

IPC: G01J3/10 ,  G01J3/28 ,  G01J3/42 ,  G01N21/25

CPC classification number: G01J3/427 ,  G01J3/10 ,  G01J3/108 ,  G01J3/2803 ,  G01J3/2846 ,  G01J3/42 ,  G01N21/35

Abstract: Methods and systems for measuring one or more properties of a sample are disclosed. The methods and systems can include multiplexing measurements of signals associated with a plurality of wavelengths without adding any signal independent noise and without increasing the total measurement time. One or more levels of encoding, where, in some examples, a level of encoding can be nested within one or more other levels of encoding. Multiplexing can include wavelength, position, and detector state multiplexing. In some examples, SNR can be enhanced by grouping together one or more signals based on one or more properties including, but not limited to, signal intensity, drift properties, optical power detected, wavelength, location within one or more components, material properties of the light sources, and electrical power. In some examples, the system can be configured for optimizing the conditions of each group individually based on the properties of a given group.

Abstract translation: 公开了用于测量样本的一个或多个特性的方法和系统。 该方法和系统可以包括对与多个波长相关联的信号的测量进行复用，而不增加任何与信号无关的噪声并且不增加总测量时间。 一个或多个级别的编码，其中在一些示例中，编码级别可以嵌套在一个或多个其他级别的编码内。 复用可以包括波长，位置和检测器状态复用。 在一些示例中，可以通过基于一个或多个属性将一个或多个信号分组在一起来增强SNR，所述一个或多个属性包括但不限于信号强度，漂移属性，检测到的光功率，波长，一个或多个组件内的位置， 光源和电力。 在一些示例中，系统可以被配置用于基于给定组的特性单独地优化每个组的条件。

公开(公告)号：WO2017184420A1

公开(公告)日：2017-10-26

申请号：PCT/US2017/027353

申请日：2017-04-13

Applicant: BRIBBLA DYNAMICS LLC

IPC: G01J3/02 ,  G01J3/36 ,  G01J3/42 ,  G01J3/10 ,  G01N21/25

Abstract: Systems and methods for determining one or more properties of a sample are disclosed. The systems and methods disclosed can be capable of measuring along multiple locations and can reimage and resolve multiple optical paths within the sample. The system can be configured with one-layer or two-layers of optics suitable for a compact system. The optics can be simplified to reduce the number and complexity of the coated optical surfaces, etalon effects, manufacturing tolerance stack-up problems, and interference-based spectroscopic errors. The size, number, and placement of the optics can enable multiple simultaneous or non- simultaneous measurements at various locations across and within the sample. Moreover, the systems can be configured with an optical spacer window located between the sample and the optics, and methods to account for changes in optical paths due to inclusion of the optical spacer window are disclosed.

Abstract translation: 公开了用于确定样本的一个或多个属性的系统和方法。 所公开的系统和方法可以能够沿着多个位置进行测量并且可以重新成像并分辨样本内的多个光路。 该系统可配置适用于紧凑型系统的单层或双层光学器件。 可以简化光学元件以减少涂层光学表面的数量和复杂性，标准具效应，制造公差累积问题和基于干涉的光谱误差。 光学元件的尺寸，数量和位置可以在样品的不同位置进行多个同时或非同时测量。 此外，该系统可以配置有位于样本和光学器件之间的光学间隔窗，并且公开了由于包含光学间隔窗而导致光学路径变化的方法。

公开(公告)号：WO2016106350A1

公开(公告)日：2016-06-30

申请号：PCT/US2015/067445

申请日：2015-12-22

Applicant: BRIBBLA DYNAMICS LLC

IPC: G02B21/00 ,  G02B21/08

CPC classification number: G02B21/0032 ,  G01N21/49 ,  G01N21/55 ,  G01N2201/063 ,  G02B21/006 ,  G02B21/0076 ,  G02B21/008 ,  G02B21/084 ,  G02B21/10 ,  G02B21/16

Abstract: A confocal inspection system can optically characterize a sample. An objective lens, which can be a single lens or a combination of separate illumination and collection lenses, can have a pupil. The objective lens can deliver incident light to the sample through an annular illumination region of the pupil, and can collect scattered light returning from the sample to form collected light. Confocal optics can be positioned to receive the collected light. A detector can be configured with the confocal optics so that the detector generates signals from light received from a specified depth at or below a surface of the sample and rejects signals from light received from depths away from the specified depth. An optical element, such as a mask, a reconfigurable panel, or the detector, can define the annular collection region to be non-overlapping with the annular illumination region in the pupil.

Abstract translation: 共焦检查系统可以光学地表征样品。 可以是单个透镜或单独的照明和收集透镜的组合的物镜可以具有瞳孔。 物镜可以通过瞳孔的环形照明区域向样品传送入射光，并且可以收集从样品返回的散射光以形成收集的光。 可以将共焦光学器件定位成接收收集的光。 检测器可以配置有共聚焦光学器件，使得检测器从从样品表面上或下面的指定深度接收的光产生信号，并从远离指定深度的深度接收的光中拒绝信号。 诸如掩模，可重构面板或检测器的光学元件可以限定与瞳孔中的环形照明区域不重叠的环形收集区域。

公开(公告)号：WO2015188058A1

公开(公告)日：2015-12-10

申请号：PCT/US2015/034402

申请日：2015-06-05

Applicant: BRIBBLA DYNAMICS LLC

IPC: G02B27/10 ,  G02B27/14 ,  G02B6/293

CPC classification number: G02B27/1006 ,  G02B27/145

Abstract: A cascaded beam combiner can receive a plurality of incident beams, including first and last incident beams. The incident beams can have overlapping wavelength spectra that decrease in wavelength from the first incident beam to the last incident beam. Bandpass filters spectrally narrow the incident beams to form respective spectrally narrowed beams inside the cascaded beam combiner. The spectrally narrowed beams can have non-overlapping wavelength spectra that decrease in wavelength from a first spectrally narrowed beam to a last spectrally narrowed beam. Long wavelength pass filters sequentially combine components of the spectrally narrowed beams from the first spectrally narrowed beam to the last spectrally narrowed beam to form a cascaded beam. The cascaded beam combiner can form a multi-wavelength beam from the cascaded beam. The multi-wavelength beam can have a wavelength spectrum that includes the non-overlapping wavelength spectra of the spectrally narrowed beams.

Abstract translation: 级联光束组合器可以接收包括第一和最后入射光束的多个入射光束。 入射光束可以具有从第一入射光束到最后入射光束的波长减小的重叠波长光谱。 带通滤波器对入射光束进行光谱窄化，以在级联光束组合器内形成相应的光谱变窄光束。 频谱变窄的光束可以具有不重叠的波长光谱，其波长从第一光谱窄化光束减小到最后光谱变窄的光束。 长波长滤波器顺序地将来自第一频谱窄波束的频谱窄化波束的分量结合到最后频谱窄波束，以形成级联波束。 级联光束组合器可以从级联光束形成多波长光束。 多波长光束可以具有包括光谱窄波束的非重叠波长光谱的波长光谱。