公开(公告)号：WO2011044043A1

公开(公告)日：2011-04-14

申请号：PCT/US2010/051324

申请日：2010-10-04

Applicant: AMERICAN WYOTT CORPORATION ,  SCHWIERKING, Roger, A. ,  GROSS, Kenneth, P.

Inventor： SCHWIERKING, Roger, A. ,  GROSS, Kenneth, P.

IPC: F23D14/00

CPC classification number: F23D14/06 ,  F23D14/08 ,  F23D14/70 ,  F23D14/84

Abstract: A gas burner apparatus comprising a burner base disposed over a gas burner, a burner head disposed over the burner base, and one or more burner covers disposed over the burner head. A method comprising a burner base over a gas burner, providing a burner head with one or more burner ports over the burner base, providing one or more burner covers over the burner head, and sliding one or more burner covers over at least one of the one or more burner ports.

Abstract translation: 一种气体燃烧器装置，包括设置在气体燃烧器上方的燃烧器基座，设置在燃烧器基座上方的燃烧器头部以及设置在燃烧器头部上方的一个或多个燃烧器盖。 一种方法，包括在气体燃烧器上的燃烧器基座，在燃烧器基座上方提供一个或多个燃烧器端口的燃烧器头部，在燃烧器头部上方提供一个或多个燃烧器盖，以及将一个或多个燃烧器罩盖滑过至少一个 一个或多个燃烧器端口。

公开(公告)号：WO2011106227A3

公开(公告)日：2011-12-08

申请号：PCT/US2011025198

申请日：2011-02-17

Applicant: KLA TENCOR CORP ,  GROSS KENNETH P ,  CHUANG YUNG-HO ,  FIELDEN JOHN

Inventor： GROSS KENNETH P ,  CHUANG YUNG-HO ,  FIELDEN JOHN

IPC: H01J65/00 ,  H01J61/16 ,  H01J61/30

CPC classification number: H01J61/302 ,  H01J61/025 ,  H01J61/16 ,  H01J61/54 ,  H01J61/86 ,  H01J65/04 ,  H01J65/042 ,  H01J65/06

Abstract: A cell for a vacuum ultraviolet plasma light source, the cell having a closed sapphire tube containing at least one noble gas. Such a cell does not have a metal housing, metal-to-metal seals, or any other metal flanges or components, except for the electrodes (in some embodiments). In this manner, the cell is kept to a relatively small size, and exhibits a more uniform heating of the gas and cell than can be readily achieved with a hybridized metal/window cell design. These designs generally result in higher plasma temperatures (a brighter light source), shorter wavelength output, and lower optical noise due to fewer gas convection currents created between the hotter plasma regions and surrounding colder gases. These cells provide a greater amount of output with wavelengths in the vacuum ultraviolet range than do quartz or fused silica cells. These cells also produce continuous spectral emission well into the infrared range, making them a broadband light source.

Abstract translation: 一种用于真空紫外等离子体光源的电池，该电池具有包含至少一种惰性气体的封闭的蓝宝石管。 除了电极（在一些实施例中）之外，这种电池不具有金属外壳，金属对金属密封件或任何其他金属凸缘或部件。 以这种方式，电池保持相对较小的尺寸，并且比用杂交金属/窗口电池设计容易实现的气体和电池表现出更均匀的加热。 这些设计通常导致较高的等离子体温度（较亮的光源），较短的波长输出以及较低的光学噪声，这是由于在较热的等离子体区域和周围较冷的气体之间产生较少的气体对流电流。 与石英或熔融石英单元相比，这些单元在真空紫外线范围内提供更多的输出波长。 这些电池还可以在红外范围内产生连续的光谱发射，使其成为宽带光源。

公开(公告)号：WO2011106227A2

公开(公告)日：2011-09-01

申请号：PCT/US2011/025198

申请日：2011-02-17

Applicant: KLA-TENCOR CORPORATION ,  GROSS, Kenneth, P. ,  CHUANG, Yung-ho ,  FIELDEN, John

Inventor： GROSS, Kenneth, P. ,  CHUANG, Yung-ho ,  FIELDEN, John

IPC: H01J65/00 ,  H01J61/30 ,  H01J61/16

CPC classification number: H01J61/302 ,  H01J61/025 ,  H01J61/16 ,  H01J61/54 ,  H01J61/86 ,  H01J65/04 ,  H01J65/042 ,  H01J65/06

Abstract: A cell for a vacuum ultraviolet plasma light source, the cell having a closed sapphire tube containing at least one noble gas. Such a cell does not have a metal housing, metal-to-metal seals, or any other metal flanges or components, except for the electrodes (in some embodiments). In this manner, the cell is kept to a relatively small size, and exhibits a more uniform heating of the gas and cell than can be readily achieved with a hybridized metal/window cell design. These designs generally result in higher plasma temperatures (a brighter light source), shorter wavelength output, and lower optical noise due to fewer gas convection currents created between the hotter plasma regions and surrounding colder gases. These cells provide a greater amount of output with wavelengths in the vacuum ultraviolet range than do quartz or fused silica cells. These cells also produce continuous spectral emission well into the infrared range, making them a broadband light source.

Abstract translation: 一种用于真空紫外线等离子体光源的电池，该电池具有包含至少一种惰性气体的封闭蓝宝石管。 除了电极（在一些实施例中），这种电池不具有金属外壳，金属对金属密封件或任何其它金属法兰或部件。 以这种方式，电池被保持为相对小的尺寸，并且表现出比使用杂化金属/窗口电池设计容易实现的气体和电池的更均匀的加热。 这些设计通常导致更高的等离子体温度（较亮的光源），更短的波长输出和更低的光学噪声，这是由于较热的等离子体区域和周围较冷的气体之间产生的较小的气体对流电流。 这些电池在真空紫外线范围内提供比石英或熔融石英电池更大的输出量。 这些电池还可以在红外范围内产生连续的光谱发射，使其成为宽带光源。

公开(公告)号：WO2007112300A3

公开(公告)日：2008-12-04

申请号：PCT/US2007064769

申请日：2007-03-23

Applicant: KLA TENCOR TECH CORP ,  WACK DAN ,  WANG HAIMING ,  GROSS KENNETH P

Inventor： WACK DAN ,  WANG HAIMING ,  GROSS KENNETH P

IPC: G01B11/14 ,  G01N21/55

CPC classification number: G01B11/24 ,  G01N21/211 ,  G01N21/47 ,  G01N21/956 ,  G01N2021/213 ,  G01N2021/217 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792

Abstract: Systems and methods for measuring one or more characteristics of patterned features on a specimen are provided. One system includes an optical subsystem configured to acquire measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The system also includes a processor configured to determine the one or more characteristics of the patterned features from the measurements. One method includes acquiring measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The method also includes determining the one or more characteristics of the patterned features from the measurements.

Abstract translation: 提供了用于测量样本上的图案特征的一个或多个特征的系统和方法。 一个系统包括光学子系统，被配置为从多个入射角，多个方位角和多个波长同时获取从样本上的图案化特征散射的光的测量。 该系统还包括配置成从测量中确定图案化特征的一个或多个特性的处理器。 一种方法包括以多个入射角，多个方位角和多个波长同时从样本上的图案化特征散射的光的测量。 该方法还包括从测量中确定图案化特征的一个或多个特性。

公开(公告)号：WO2007112300A2

公开(公告)日：2007-10-04

申请号：PCT/US2007/064769

申请日：2007-03-23

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION ,  WACK, Dan ,  WANG, Haiming ,  GROSS, Kenneth P.

Inventor： WACK, Dan ,  WANG, Haiming ,  GROSS, Kenneth P.

IPC: G01B11/14 ,  G01N21/55

CPC classification number: G01B11/24 ,  G01N21/211 ,  G01N21/47 ,  G01N21/956 ,  G01N2021/213 ,  G01N2021/217 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792

Abstract: Systems and methods for measuring one or more characteristics of patterned features on a specimen are provided. One system includes an optical subsystem configured to acquire measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The system also includes a processor configured to determine the one or more characteristics of the patterned features from the measurements. One method includes acquiring measurements of light scattered from the patterned features on the specimen at multiple angles of incidence, multiple azimuthal angles, and multiple wavelengths simultaneously. The method also includes determining the one or more characteristics of the patterned features from the measurements.

Abstract translation: 提供了用于测量样本上的图案特征的一个或多个特征的系统和方法。 一个系统包括光学子系统，被配置为从多个入射角，多个方位角和多个波长同时获取从样本上的图案化特征散射的光的测量。 该系统还包括配置成从测量中确定图案化特征的一个或多个特性的处理器。 一种方法包括以多个入射角，多个方位角和多个波长同时从样本上的图案化特征散射的光的测量。 该方法还包括从测量中确定图案化特征的一个或多个特性。