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1.发明申请
公开(公告)号：WO2011115197A9
公开(公告)日：2012-01-12
申请号：PCT/JP2011056352
申请日：2011-03-17
Applicant: NAT INST OF ADVANCED IND SCIEN , KIM JAEHO , ISHIHARA MASATOU , KOGA YOSHINORI , TSUGAWA KAZUO , HASEGAWA MASATAKA , IIJIMA SUMIO , YAMADA TAKATOSHI
Inventor： KIM JAEHO , ISHIHARA MASATOU , KOGA YOSHINORI , TSUGAWA KAZUO , HASEGAWA MASATAKA , IIJIMA SUMIO , YAMADA TAKATOSHI
IPC: C23C16/26 , C23C16/511 , C23C16/54 , H01B13/00
CPC classification number: C23C16/511 , B82Y30/00 , B82Y40/00 , C01B32/188 , C23C16/26 , C23C16/545 , H01B1/04
Abstract: The disclosed method for the formation of a transparent conductive carbon film solves the problems of high temperature processing and long processing times, which are issues in graphene film deposition by thermal CVD, and uses a crystalline carbon film formed at lower temperatures and in less time using a graphene film. The disclosed method is characterised in that: the substrate temperature is set to 500°C or less; the pressure is set to 50 Pa or less; and a transparent conductive carbon film is deposited on the substrate surface of a copper or aluminium thin film by a microwave surface-wave plasma CVD process under a gas atmosphere in which an oxidation inhibitor for inhibiting the oxidation of the substrate surface is added to a mixed gas comprising a carbon-containing gas and an inert gas as an additive gas.
Abstract translation: 所公开的形成透明导电碳膜的方法解决了通过热CVD在石墨烯膜沉积中存在的高温处理和长处理时间的问题，并且使用在较低温度和更短时间内形成的结晶碳膜，使用 石墨烯膜。 所公开的方法的特征在于：将基板温度设定为500℃以下; 压力设定为50Pa以下; 并且通过微波表面波等离子体CVD工艺在氧化气氛中在铜或铝薄膜的基板表面上沉积透明导电性碳膜，其中将用于抑制基板表面的氧化的氧化抑制剂加入到混合 包含含碳气体和作为添加气体的惰性气体的气体。
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公开(公告)号：JP2000063112A
公开(公告)日：2000-02-29
申请号：JP22547098
申请日：1998-07-25
Applicant: JAPAN SCIENCE & TECH CORP , NATL DE LA RECH SCIENT CENTRE , IIJIMA SUMIO , YUDASAKA MASAKO , KOMI FUMIO , TAKAHASHI KUNIMITSU , KUMAGAI MIKIRO , BANDO TOSHIHARU , SUENAGA KAZUTOMO
Inventor： IIJIMA SUMIO , YUDASAKA MASAKO , KOMI FUMIO , TAKAHASHI KUNIMITSU , KUMAGAI MIKIRO , BANDO TOSHIHARU , SUENAGA KAZUTOMO , CHRISTIAN COLLIEX
Abstract: PROBLEM TO BE SOLVED: To economically and efficiently obtain homogeneous single-layer carbon nanotubes through a simple method by irradiating the carbon target containing a small amount of metal with a high-power carbon dioxide gas laser to effect the carbon gas laser evaporation in an inert gas atmosphere. SOLUTION: In this production, the carbon target substance and the atmospheric inert gas do not need to be heated. As an inert gas, are cited Ar, He or a variety of other gases, The carbon target substance may contain a small amount of metal as a catalyst, for example, graphite containing Fe, Co, Ni, Pt, Pd, Rh or the like, and is placed in a vessel. The gas pressure in the vessel caused by introduction of the inert gas is preferably set to, for example, 104-105 Pa. The high-pressure CO2 gas laser beam is desirably a continuous wave laser with an output power of 800-1,500 Watts. The laser beam can be irradiated almost at the rectangle to the target surface or at an angle less than 90 degree.
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公开(公告)号：JPH055896B2
公开(公告)日：1993-01-25
申请号：JP8928389
申请日：1989-04-07
Applicant: SHINGIJUTSU JIGYODAN , IIJIMA SUMIO
Inventor： IIJIMA SUMIO
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公开(公告)号：JPS61205604A
公开(公告)日：1986-09-11
申请号：JP4373785
申请日：1985-03-07
Applicant: JAPAN RES DEV CORP , HIRAYAMA TSUKASA , IIJIMA SUMIO
Inventor： HIRAYAMA TSUKASA , IIJIMA SUMIO
Abstract: PURPOSE:To obtain a large amount of the titled high-quality ultrafine particles in high efficiency easily and economically, by burning metallic powder in a high-temperature flame containing O2. CONSTITUTION:Metallic powder of raw material is dropped and fed from the powder storage tank 4 through the powder feed pipe 5 to the combustion tube 6 set in such a way that the tube is extended in the tip direction of the high- flame gas burner 1 while adjusting the dropping amount of the power by the control cock 3, secondary O2 is optionally fed from a secondary oxygen feed pipe to the combustion chamber 6, the powder is burned in the high-temperature flame containing O2 from the burner 1, the titled smoking ultrafine particles having
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公开(公告)号：JPS6345619B2
公开(公告)日：1988-09-09
申请号：JP16126984
申请日：1984-07-31
Applicant: SHINGIJUTSU KAIHATSU JIGYODAN , IIJIMA SUMIO
Inventor： IIJIMA SUMIO
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Patent Agency Ranking
公开(公告)号：JPS62247839A
公开(公告)日：1987-10-28
申请号：JP8934486
申请日：1986-04-18
Applicant: JAPAN RES DEV CORP , IIJIMA SUMIO
Inventor： IIJIMA SUMIO
Abstract: PURPOSE:To obtain the titled ultra-fine particules catalyst by a completely dry process by using the vapor of a metal or its compd. formed by sputtering to deposit ultra-fine particles on a fibrous catalyst carrier. CONSTITUTION:A DC sputtering or RF sputtering process is used for the sputtering. The fibers in the form of cotton and cloth can be used as the catalyst carrier fibers. The inorg. fibers of gamma-alumina, etc., an org. polymer, and metallic fibers can be used as the fibers. The surface of the fiber can be modified with the ultra-fine particles of the substance to be used as the catalyst, and metals such as Au and their alloy or compd. can be used as the ultra-fine particulate catalyst. The kind of ultra-fine particles can be changed by changing the target material in the sputtering process. The ultra-fine particles are fused to each other by heat treatment.
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公开(公告)号：JPS6246905A
公开(公告)日：1987-02-28
申请号：JP18581885
申请日：1985-08-26
Applicant: JAPAN RES DEV CORP , HIRAYAMA TSUKASA , IIJIMA SUMIO
Inventor： HIRAYAMA TSUKASA , IIJIMA SUMIO
Abstract: PURPOSE:To easily produce ultrafine oxide particles with extremely high efficiency with an extremely simple device by burning metallic powder in oxygen (contg. gas). CONSTITUTION:A carrier gas ejected from a nozzle 11 forces the metallic gas in a powder storage vessel 1 to solar up and conveys the powder by the gaseous flow through a transport pipe 2. The gas is then ejected from a combustion nozzle 3 into a combustion pipe 4. The oxygen can be further replenished thereto through an oxygen nozzle 61 provided to the periphery of the nozzle 3. The smoke-like ultrafine oxide particles are formed when the metallic powder ejected into the combustion pipe 4 is ignited and burned by a pilot burner 41 attached to the pipe 4. The formed ultrafine oxide particles are collected by the collector 5. The quality of the ultrafine oxide particles obtd. by such extremely simple device is approximately equal to the quality of the particles obtd. by the conventional dry process. The production of the ultrafine oxide particles with the extremely high efficiency is thus made possible without using costly raw material, device and fuel.
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公开(公告)号：JP2001064004A
公开(公告)日：2001-03-13
申请号：JP22547198
申请日：1998-07-25
Applicant: JAPAN SCIENCE & TECH CORP , CT NATL DE LA RECH SCIENT , IIJIMA SUMIO , YUDASAKA MASAKO , KOMI FUMIO , TAKAHASHI KUNIMITSU , KUMAGAI MIKIRO , BANDO TOSHIHARU , SUENAGA KAZUTOMO
Inventor： IIJIMA SUMIO , YUDASAKA MASAKO , KOMI FUMIO , TAKAHASHI KUNIMITSU , KUMAGAI MIKIRO , BANDO TOSHIHARU , SUENAGA KAZUTOMO , CHRISTIAN COLLIEX
Abstract: PROBLEM TO BE SOLVED: To provide a new single layer carbon nano-horn structure which has a hollow conical structure constituted of a single layer having the thickness corresponding to the size of carbon atom and which is expected to be developed as a new functional material. SOLUTION: The conical form mentioned above is nearly conical form and, eventually, a horn form. In the whole structure, the conical structure is specified as such a structure that the diameter D of the tubular part 2 increases continuously with the closed tip end part 1 as an apex. Both parts of the closed tip end part 1 and the tubular part 2 are constituted of a single layer structure having the thickness corresponding to the size of one carbon atom. A method for producing the hollow conical structure comprises irradiating a solid carbon simple substance with laser light under an inert gas atmosphere to subject it to carbon laser evaporation to obtain soot-like substance, that is powder formed by the aggregation of the spherical substance. Further the powder is suspended in a solvent to recover spherical particles, each being in the single particle state or in the aggregated state of plural particles.
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公开(公告)号：JPS6320480A
公开(公告)日：1988-01-28
申请号：JP16542286
申请日：1986-07-14
Applicant: JAPAN RES DEV CORP , IIJIMA SUMIO
Inventor： IIJIMA SUMIO
Abstract: PURPOSE:To form a uniform thin film having desired properties by a vapor phase method and to reform the surface of powder or fibrous material by heating the powder or fibrous material in an atmosphere of a reactive gas or gaseous mixture composed of the reactive gas and inert gas. CONSTITUTION:The powder or fibrous material 1 is put into a crucible 2 and the crucible is put into a heating furnace where a carbon heating element 3 or the like is used as a heat source. The heating furnace is installed to a heat insulating vessel 4 and the inside of an outside vessel 5 is evacuated. The reactive gas or the gaseous mixture composed of the reactive gas and inert gas is introduced from a gas supply line 8 into the vessel upon confirmation that a prescribed pressure is attained therein. The material is heated by the energization from conducting terminals 9. The thin film is formed on the surface of the powder or fibrous material by such treatment. This treatment is applicable to the case of forming a graphite film, etc., on the surface of nickel powder or silicon powder.
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公开(公告)号：JPS61291406A
公开(公告)日：1986-12-22
申请号：JP12271685
申请日：1985-06-07
Applicant: JAPAN RES DEV CORP , HIRAYAMA TSUKASA , IIJIMA SUMIO
Inventor： HIRAYAMA TSUKASA , IIJIMA SUMIO
Abstract: PURPOSE:To produce ultra-fine oxide particles having extremely high crystallinity, easily and economically in high yield, by mixing molten and atomized metal with oxygen(-containing gas) to effect the combustion of the metal. CONSTITUTION:Metal (e.g. aluminum) is thrown into a smelting tank 11 through an inlet port, melted by heating with the heater 12, transferred through the pipe 3 by the pressure of gas supplied from the gas bomb 15 and sprayed and atomized at a high speed from the orifice 21 of the molten metal spray nozzle 2. In the above apparatus, air and/or oxygen are sucked through the air-suction port 24 provided between the nozzle cover 23 and the cap 22, mixed with the atomized metal, and ignited with the igniter 25 placed in front of the nozzle 2. The metal is burnt in the combustion pipe 4 to form ultra-fine oxide particle fume. The ultra-fine particles are introduced together with the combustion exhaust into the ultra-fine particle collector 5 and collected.
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