公开(公告)号：WO2010029656A3

公开(公告)日：2010-06-24

申请号：PCT/JP2009001970

申请日：2009-04-30

Applicant: PANASONIC CORP ,  MIYOSHI YUICHI ,  YAMAOKA TOHRU ,  NOTAKE HIDENORI ,  TAKEUCHI YUSUKE

Inventor： MIYOSHI YUICHI ,  YAMAOKA TOHRU ,  NOTAKE HIDENORI ,  TAKEUCHI YUSUKE

IPC: B81C1/00

CPC classification number: B81C1/00158 ,  B81B2201/0257 ,  B81C2201/0133 ,  G01P15/0802 ,  G01P15/097 ,  G01P15/123

Abstract: A MEMS device, including: a substrate (101) having a first principal plane and a second principal plane opposite to the first principal plane; a through hole (110) formed in the substrate (101); and a vibrating film (105) formed over the first principal plane so as to cover the through hole (110). The first principal plane and the second principal plane are both a (110) crystal face; and the through hole (110) has a substantially rhombic shape on the second principal plane.

Abstract translation: 一种MEMS器件，包括：具有第一主平面和与第一主平面相对的第二主平面的衬底（101）; 形成在所述基板（101）中的通孔（110）; 以及形成在所述第一主平面上以覆盖所述通孔（110）的振动膜（105）。 第一主平面和第二主平面都是（110）晶面; 并且所述通孔（110）在所述第二主平面上具有大致菱形。

公开(公告)号：WO2010029656A2

公开(公告)日：2010-03-18

申请号：PCT/JP2009/001970

申请日：2009-04-30

Applicant: PANASONIC CORPORATION ,  MIYOSHI, Yuichi ,  YAMAOKA, Tohru ,  NOTAKE, Hidenori ,  TAKEUCHI, Yusuke

Inventor： MIYOSHI, Yuichi ,  YAMAOKA, Tohru ,  NOTAKE, Hidenori ,  TAKEUCHI, Yusuke

IPC: B81C1/00

CPC classification number: B81C1/00158 ,  B81B2201/0257 ,  B81C2201/0133 ,  G01P15/0802 ,  G01P15/097 ,  G01P15/123

Abstract: A MEMS device, including: a substrate (101) having a first principal plane and a second principal plane opposite to the first principal plane; a through hole (110) formed in the substrate (101); and a vibrating film (105) formed over the first principal plane so as to cover the through hole (110). The first principal plane and the second principal plane are both a (110) crystal face; and the through hole (110) has a substantially rhombic shape on the second principal plane.

Abstract translation: 一种MEMS器件，包括：衬底（101），具有第一主平面和与所述第一主平面相对的第二主平面; 形成在所述基板（101）中的通孔（110）; 和形成在第一主平面上以覆盖通孔（110）的振动膜（105）。 第一主平面和第二主平面都是（110）晶面; 并且通孔（110）在第二主平面上具有基本上菱形的形状。